Apparatus for forming a deposited curver coating on a substrate

Details Apparatus for forming a deposited curver coating on a substrate Apparatus for forming a deposited curver coating on a substrate

1996-09-11

1998-12-01

Beck, Shrive

Coating apparatus

Gas or vapor deposition

Having means to expose a portion of a substrate to coating...

118504, 427282, 427585, C23C 1604

Patent

active

058432353

ABSTRACT:
A substrate holder and mask system for depositing curved films and mirrors on flat mirror substrates. A spherical mask is held in close proximity to a substrate by a support structure to intercept a fraction of vapor from a distant source. The film deposited on the substrate behind the mask has a spherically symmetric curvature when the source has a large area. The cross section of the mask support structure is made as small as possible to minimize irregularities in the spherical figure. A mirror is subsequently deposited on said curved substrate after removing said mask.

REFERENCES:
patent: 4506185 (1985-03-01), Giler et al.
patent: 4557798 (1985-12-01), Blanding et al.

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