Apparatus for floating melt zone processing of a semiconductor r

Details Apparatus for floating melt zone processing of a semiconductor r Apparatus for floating melt zone processing of a semiconductor r

1976-07-23

1978-05-30

Emery, Stephen J.

Chemistry: physical processes

Physical processes

Crystallization

156620, 13DIG1, 23273SP, B01J 1710

Patent

active

040921247

ABSTRACT:
An apparatus for floating melt zone processing of a semiconductor rod including an axially fixed induction heating coil wherein the heating coil is attached to a horizontal shift means having an amplitude sufficiently great to move the coil away from the rod during insertion and/or removal of the rod in the apparatus.

REFERENCES:
patent: 2976339 (1961-03-01), Gruber
patent: 3391235 (1968-07-01), Emeis
patent: 3622280 (1971-11-01), Keller
patent: 3630684 (1971-12-01), Keller
patent: 3650700 (1972-03-01), Erneis
patent: 3685973 (1972-08-01), Keller
Lawson, Preparation of Single Crystals, London, 1958, p. 67.

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