Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate
2006-02-28
2006-02-28
Hassanzadeh, Parviz (Department: 1763)
Coating apparatus
Gas or vapor deposition
With treating means
Reexamination Certificate
active
07004108
ABSTRACT:
An apparatus for fixing an eletrode of an electrode of plama polymerization apparatus is provided, which comprises; a nonconductive holder for fixing an electrode by covering an end part of the electrode, a leadline connecting the electrode with a power supply, and a fixing part fixing the holder on a chamber wall.
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Ha Sam Chul
Youn Dong-Sik
Crowell Michelle
LG Electronics Inc.
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