Apparatus for fixing an electrode in plasma polymerizing...

Coating apparatus – Gas or vapor deposition – With treating means

Reexamination Certificate

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Reexamination Certificate

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07004108

ABSTRACT:
An apparatus for fixing an eletrode of an electrode of plama polymerization apparatus is provided, which comprises; a nonconductive holder for fixing an electrode by covering an end part of the electrode, a leadline connecting the electrode with a power supply, and a fixing part fixing the holder on a chamber wall.

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