Apparatus for feeding wafers and the like

Details Apparatus for feeding wafers and the like Apparatus for feeding wafers and the like

1985-01-29

1986-05-27

Spar, Robert J.

Conveyors: power-driven

With means to facilitate working, treating, or inspecting...

Conveyor lowers the load to at least one of a plurality of...

1984688, 198631, 198817, B23Q 700

Patent

active

045910448

ABSTRACT:
An apparatus for feeding semiconductor substrates (i.e., wafers) or the like along a path to a processing section such as a hot plate, and moving the same therefrom to the next process. The apparatus includes: a belt conveyor means preferably comprised for a pair of belts and having a horizontal top surface which can be driven along the feed path; means for raising and lowering the belt conveyor means to allow the wafers to be placed into position and taken out of position on the processing section; a processing plate associated with the processing section having a suction tube through which a vacuum is applied to a wafer on the processing plate, and also having grooves to receive the belts when the wafer is placed on the processing plate; and elevator means, which cooperate with the belt conveyor means, for raising the wafer to detach from the plate. The elevator means protrudes and withdraws with respect to the upper surface of the processing plate, and may take several forms such as horizontal longitudinal members which are received by grooves in the processing plate, or pins projecting from the holes in the processing plate through which the pneumatic suction is applied to the wafers during the heat treatment provided by the hot plate.

REFERENCES:
patent: 3052339 (1962-09-01), Carter
patent: 4217977 (1980-08-01), Tam
patent: 4457419 (1984-07-01), Ogami et al.

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