Apparatus for feeding raw material into a quartz crucible and me

Details Apparatus for feeding raw material into a quartz crucible and me Apparatus for feeding raw material into a quartz crucible and me

1998-09-22

1999-12-28

Hiteshew, Felisa

Single-crystal, oriented-crystal, and epitaxy growth processes;

Processes of growth from liquid or supercritical state

Having pulling during growth

117 33, 117214, G30B 1520

Patent

active

060076216

ABSTRACT:
The invention is to provide a method for automatically and rapidly feeding raw material into a quartz crucible in manufacture of single-crystal silicon by CZ method. For example, after a draining hose 203 is disposed in a quartz crucible 201, pure water is supplied from a water supply hose 204, and the quartz crucible 201 is conveyed onto a turn table 213 installed under a container 210. At this time, the quartz crucible 201 is rotated, and lump raw material 209 is fed into the quartz crucible 201. Since buoyancy of the pure water is applied to the lump material 209, impacts caused by the falling lump material can be moderated, and therefore, damages to the quartz crucible 201 can be prevented. After feeding raw material is finished, the pure water is discharged through a draining hose 203, and then the draining hose 203 is retracted from the quartz crucible 201. Thereafter, the quartz crucible 201 is conveyed into a microwave oven 211 for drying.

REFERENCES:
patent: 5580171 (1996-12-01), Lim et al.
patent: 5588993 (1996-12-01), Holder
patent: 5868835 (1999-02-01), Nagai et al.

Affiliated with

Also associated with

Rating

Apparatus for feeding raw material into a quartz crucible and me does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for feeding raw material into a quartz crucible and me, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for feeding raw material into a quartz crucible and me will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2379577