Apparatus for feature detection

Details Apparatus for feature detection Apparatus for feature detection

2007-03-20

2007-03-20

Lauchman, Layla (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

C356S239300, C356S239200, C356S239800, C356S237300

Reexamination Certificate

active

11188423

ABSTRACT:
An apparatus for feature detection of a test object includes at least one light source module and at least one image capturing unit. The light source module provides light to illuminate a test region of the test object, and includes a substrate, a set of light-emitting components, and a light-focusing unit. The light-emitting components are mounted on the substrate for emitting light in parallel directions that are generally transverse to the substrate. The light-focusing unit is to be disposed between the light-emitting components and the test object, receives the light emitted by the light-emitting components, and focuses the light on the test region of the test object. The image capturing unit captures an image of the test object at the test region.

REFERENCES:
patent: 4806776 (1989-02-01), Kley
patent: 2003/0210391 (2003-11-01), Uto et al.
patent: 2003/0218125 (2003-11-01), Igaki et al.

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