Coating apparatus – Gas or vapor deposition – Running length work
Patent
1996-04-08
1999-01-26
Bueker, Richard
Coating apparatus
Gas or vapor deposition
Running length work
118719, 118725, 118726, 505473, C23C 1600
Patent
active
058633367
ABSTRACT:
An apparatus for thallium-containing superconductor with grains having c-axis alignment perpendicular to the plane of the substrate is fabricated by controlling the thallium oxide vapor partial pressure during the steps of warming the precursor, reaction soaking the precursor with the thallium oxide vapor, and cooling the thallium-containing precursor in a thallium oxide vapor below about 10.sup.-3 atmospheres.
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Deluca John Anthony
Karas Pamela Lynn
Tkaczyk John Eric
Bueker Richard
General Electric Company
Johnson Noreen C.
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