Apparatus for fabricating surface emitting semiconductor laser

Coherent light generators – Particular active media – Semiconductor

Reexamination Certificate

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C372S050100, C356S445000

Reexamination Certificate

active

07079562

ABSTRACT:
A method of fabricating a surface emitting semiconductor laser includes a first step of forming, on a substrate, multiple monitor-use semiconductor layers having stripes radiating from a center of the substrate, and a laser portion that includes semiconductor layers and is located on the periphery of the multiple monitor-use semiconductor layers, a second step of monitoring oxidized conditions on the multiple monitor-use semiconductor layers when a selectively oxidized region is formed in the laser portion, and a third step of controlling oxidization of the selectively oxidized region on the basis of the oxidized conditions thus monitored.

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patent: 5978408 (1999-11-01), Thornton
patent: 6075804 (2000-06-01), Deppe et al.
patent: 6459713 (2002-10-01), Jewell
patent: 6693707 (2004-02-01), Kaneko
patent: 2003/0139060 (2003-07-01), Sai
patent: A 2001-93897 (2001-04-01), None

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