Apparatus for fabricating a semiconductor device

Radiant energy – Ion generation – Field ionization type

Reexamination Certificate

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Details

C438S464000, C438S460000

Reexamination Certificate

active

07005650

ABSTRACT:
An apparatus for fabricating a semiconductor device, including an ultraviolet radiation source, a lamp house body surrounding the ultraviolet radiation source, the lamp house body carrying a mirror surface, an opening provided on the lamp house body, and a vacuum chuck provided on the lamp house body so as to cover the opening, the vacuum chuck being adapted for supporting a semiconductor substrate thereon in a state that the semiconductor substrate is covered by adhesive tape, wherein the vacuum chuck is formed of a material which is substantially transparent to ultraviolet radiation produced by the ultraviolet radiation source.

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