Apparatus for exposing periphery of an object

Details Apparatus for exposing periphery of an object Apparatus for exposing periphery of an object

1993-01-14

1994-02-22

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356400, 355 53, G01B 1114, G03B 2742

Patent

active

052892638

ABSTRACT:
A periphery exposing apparatus for exposing a periphery of a wafer having a curved circumferential peripheral portion and a linear portion comprises a spin chuck for rotatably supporting the wafer, a light source disposed above the spin chuck for exposing the wafer periphery, and a detector for detecting the line or portion. When the linear portion is being exposed, the light source is moved along the linear portion, rather than circularly around the periphery.

REFERENCES:
patent: 4752898 (1988-06-01), Koenig
patent: 4907035 (1990-04-01), Galburt et al.
patent: 4910549 (1990-03-01), Sugita
patent: 5028955 (1991-07-01), Hayashida et al.

Affiliated with

Also associated with

Rating

Apparatus for exposing periphery of an object does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for exposing periphery of an object, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for exposing periphery of an object will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-175867