Photocopying – Projection printing and copying cameras – Original moves continuously
Patent
1994-03-18
1995-05-30
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Original moves continuously
355 53, 355 77, 356375, G03B 2748, G03B 2750
Patent
active
054206634
ABSTRACT:
An exposure apparatus for exposing a peripheral portion of a substrate to light comprises a rotating member for rotating a substrate to which a resist is applied, an irradiating system for irradiating the substrate with light which is sensed by the resist, a position detecting system for detecting a relative position between the light and the substrate in a radial direction of the substrate, a moving system for making a relative movement between the light and the substrate in the radial direction of the substrate, a periphery detecting member for detecting outer-periphery information corresponding to a shape of an outer periphery of the substrate, a control system for servo-controlling the moving system in accordance with the outer periphery of the substrate to make the width of the light emitted on the substrate constant, a characteristic detecting member for detecting a specific part of the peripheral portion of the substrate, and a control characteristic changing member for changing a control quantity of the control system at the specific part of the peripheral portion of the substrate.
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Naito Masayoshi
Nakajima Masao
Nikon Corporation
Wintercorn Richard A.
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