Apparatus for exposing a photosensitive beltlike material

Details Apparatus for exposing a photosensitive beltlike material Apparatus for exposing a photosensitive beltlike material

1976-03-31

1977-09-20

Griffin, Donald A.

Photocopying

Projection printing and copying cameras

Identifying, composing, or selecting

355 64, G03B 2752, G03B 2732

Patent

active

040493458

ABSTRACT:
Apparatus for exposing an image of a desired pattern, such as a lead frame pattern for producing lead frames of IC devices, with a predetermined pitch on a photosensitive beltlike material consisting of a film carrier and a photoresist-coated metallic foil laminated on the carrier.
Apparatus typically comprises a first means for positively supporting and accurately positioning the beltlike material at an exposing position, a second means for intermittently conveying the material and a third means for photoelectrically detecting the amount of the movement of the beltlike material to control the first and the second means.

REFERENCES:
patent: 3113498 (1963-12-01), Kallenberg
patent: 3148585 (1964-09-01), Armstrong et al.
patent: 3165024 (1965-01-01), McClure
patent: 3369449 (1968-02-01), Klauss et al.
patent: 3617125 (1971-11-01), Sobottke et al.
patent: 3689149 (1972-09-01), Livingood
patent: 3883243 (1975-05-01), Weisglass et al.
patent: 3900257 (1975-08-01), Woolley et al.

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