Apparatus for examining the surface of a substrate

Details Apparatus for examining the surface of a substrate Apparatus for examining the surface of a substrate

1988-07-29

1990-03-13

Scott, Jr., Leon

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250236, 250572, 356430, G01N 2188

Patent

active

049085174

ABSTRACT:
An apparatus for examining the surface of a substrate comprises irradiating means for supplying a light beam which scans the surface of the substrate, first and second light-receiving means for individually receiving scattered lights travelling in different first and second directions from the surface of the substrate and individually producing first and second output signals conforming to the intensities of the received lights, and means for discriminating the directional characteristics of the scattered lights on the basis of the time phase shift between the first and second output signals.

REFERENCES:
patent: 4363118 (1982-12-01), Roach et al.
patent: 4468120 (1984-08-01), Tanimoto et al.
patent: 4613753 (1986-09-01), Okada et al.
patent: 4849645 (1989-07-01), Mendenko et al.

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