Apparatus for evaluating piezoelectric film, and method for...

Details Apparatus for evaluating piezoelectric film, and method for... Apparatus for evaluating piezoelectric film, and method for...

2006-08-30

2008-12-02

Noland, Thomas P (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

C073S001150, C073SDIG010

Reexamination Certificate

active

07458254

ABSTRACT:
There are provided an apparatus for evaluating a piezoelectric film, which contains: a detection unit containing a pair of probes, each probe containing a cantilever and a probe tip; and an evaluation unit, wherein the detection unit is configured to respectively place the probe tips on both surfaces of a sample comprising a piezoelectric film so as to detect a displacement magnitude of the pair of probes, and the evaluation unit is configured to evaluate either or both a deformation and a displacement of the piezoelectric film based upon the detected displacement magnitude of the pair of probes, and a method for evaluating a piezoelectric film by using the apparatus for evaluating a piezoelectric film.

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A.L. Kholkin et al.; Interferometric measurements of electric field-induced displacements in piezoelectric thin films,: Rev. Sci. Instrum. 67 (5), May 1996, American Institute of Physics, 1935-1941.

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