Apparatus for evaluating characteristics of semiconductor device

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

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439179, G01R 106

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active

054914256

ABSTRACT:
A probe is attached to a support plate vertically to the surface of the support plate. A drop of a molten metal is formed at a tip portion of the probe. The support plate has a heater for setting the temperature of the probe and the drop of the molten metal at the tip portion of the probe. The probe is situated at a position corresponding to a position of an electrode of an LSI. The probe is connected to a measuring device for evaluating characteristics of the LSI by wiring. The drop of the molten metal connects the probe and the electrode of the LSI electrically.

REFERENCES:
patent: 3622944 (1971-11-01), Tsuchiya
patent: 4289369 (1981-09-01), Taketoshi
patent: 4409546 (1983-10-01), Shulman
patent: 4587484 (1986-05-01), Shulman
patent: 5325052 (1994-06-01), Yamashita
Koens, "Micromanipulator Liquid Contact Tester Probe," IBM Technical Disclosure Bulletin, vol. 15, No. 1, Jun. 1972.
Greene et al., "Electro-Machining of Test Probes," IBM Technical Disclosure Bulletin, vol. 21, No. 5, Oct. 1978.

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