Apparatus for evaluating a lens

Optics: measuring and testing – Lens or reflective image former testing – For optical transfer function

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G01B 900

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active

050627058

ABSTRACT:
A first reticle is located at an object position of a lens to be evaluated. The first reticle is formed with a first diffraction grating. A stage supports the first reticle. A coherent light source illuminates a whole region of the first diffraction grating. A spatial filter blocks a 0-order component of diffraction light from the first diffraction grating. A second reticle is located at an image position of the lens and is formed with a second diffraction grating. A stage moves the second reticle within a projection range of the lens. Interference fringes are formed on the second reticle by re-diffraction by the lens. Moire fringes are caused by the second diffraction grating and the interference fringes. The moire fringes are observed.

REFERENCES:
patent: 4772119 (1988-09-01), Bouwhuis et al.
patent: 4891663 (1990-01-01), Hirose
Zimmerman, Applied Optics, vol. 2, No. 7, Jul. 1963, pp. 759-760.

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