Apparatus for etching vertical junction solar cell wafers

Details Apparatus for etching vertical junction solar cell wafers Apparatus for etching vertical junction solar cell wafers

1983-12-28

1985-02-26

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156637, 156662, H01L 21306, C23F 102, B44C 122, C03C 1500

Patent

active

045016364

ABSTRACT:
An apparatus for etching semiconductor wafers which comprises a cylindrical vessel with a lid having associated cooling means, a basket assembly, rack means for holding a plurality of wafers, support means for supporting the basket assembly above the bottom of the vessel, and stirring means.

REFERENCES:
patent: 3765969 (1973-10-01), Kragness et al.
patent: 3964957 (1976-06-01), Walsh
patent: 3985579 (1976-10-01), Rahilly
patent: 4155866 (1979-05-01), Berkenblit et al.
patent: 4227942 (1980-10-01), Hall

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