Etching a substrate: processes – Forming or treating article containing a liquid crystal...
Reexamination Certificate
2011-03-01
2011-03-01
Alanko, Anita K (Department: 1713)
Etching a substrate: processes
Forming or treating article containing a liquid crystal...
C216S024000, C216S041000, C216S049000, C216S083000, C216S084000, C134S018000, C134S026000, C134S032000, C134S095200, C134S095300
Reexamination Certificate
active
07897056
ABSTRACT:
Disclosed are an apparatus for etching or stripping a substrate of a liquid crystal display device and a method thereof. The present invention includes carrying out an etching or stripping process on substrates using an etchant in a first etchant tank, counting a number of the substrates etched or stripped using the etchant in the first etchant tank, checking readiness of a second etchant tank at a predetermined point in time before the counted number reaches a maximum substrate number set up previously for the etchant tanks, and carrying out the etching or stripping process on the substrates using an etchant in the second etchant tank when the second etchant tank is in readiness for use and the counted number reaches the maximum substrate number.
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Lee Dug Jang
Lee Won Jae
Alanko Anita K
Birch & Stewart Kolasch & Birch, LLP
LG Display Co. Ltd.
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