Apparatus for etching glass substrate

Details Apparatus for etching glass substrate Apparatus for etching glass substrate

1997-06-26

2000-06-06

Utech, Benjamin

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

216 97, 239 76, 239536, H01L 21306

Patent

active

060713747

ABSTRACT:
An apparatus for etching a glass substrate includes a first bath 13 containing an etchant, at least one porous panel 15 having a plurality of jet holes 16 in the first bath, the porous panel containing the etchant to jet the etchant against the glass substrate 30, a container 20 storing the etchant, and a pump 24 supplying the etchant from the container to the porous panel, the pump being connected to the container and the porous panel.

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