Apparatus for etching and coating sample specimens for microscop

Details Apparatus for etching and coating sample specimens for microscop Apparatus for etching and coating sample specimens for microscop

1997-10-20

1999-07-13

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20419211, 20429836, 20419234, C23C 1434

Patent

active

059221798

ABSTRACT:
An apparatus and process for the etching and coating of samples in a single vacuum chamber, thus minimizing handling and transfer of the samples is provided. The apparatus includes a sealed chamber and a vacuum pump for forming and maintaining a vacuum in the chamber, a first ion gun positioned in the chamber to etch a sample, a sputtering target in the chamber, and at least one additional ion gun positioned in the chamber to cause material from the target to be directed onto the sample.

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