Apparatus for establishing reference coordinates for a point on

Details Apparatus for establishing reference coordinates for a point on Apparatus for establishing reference coordinates for a point on

1997-11-26

1999-10-05

Tentoni, Leo B.

Coating apparatus

With indicating, testing, inspecting, or measuring means

118500, 118715, 118729, 414217, 414222, 414935, B05C 1100, B05C 1300, C23C 1652

Patent

active

059617225

ABSTRACT:
An apparatus and method for establishing reference coordinates for a point on a component. The apparatus includes a base and a component carriage that is movably attached to the base for movement relative to the base along a first axis. The apparatus further includes a locator plate movably attached to the base for movement relative to the base along a second axis that is perpendicular to the first axis. Coordinate indicia is provided on the component carriage and reference indicia is provided on the locator plate. When the reference indicia is brought into registration with the point on the component, corresponding coordinates are identified where the reference indicia cross the coordinate indicia located on the carriage.

REFERENCES:
patent: 5249216 (1993-09-01), Ohsugi et al.
patent: 5395446 (1995-03-01), Kageyama et al.
patent: 5686314 (1997-11-01), Miyazaki
C. Neumann and P. Eichinger, Ultra-Trace Analysis of Metallic Contaminations on Silicon Wafer Surfaces by Vapour Phase Decomposition/Total Reflection X-Ray Fluorescene (VPD/TXRF), Spectochimica Acta, vol. 46B, No. 10, 1991.
Diebold, Maillot, Gordon, Baylis, Chacon, Witowski, Arlinghaus Knapp and Doyle, Evaluation of Surface Analysis Methods for Characterization of Trace Metal Surface Contaminants Found in Silicon Integrated Circuit Manufacturing, J. Vac. Sci. Technology, A, vol. 10 No. 4, Jul./Aug. 1992.

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