Apparatus for enhancing depth of focus using birefringent materi

Details Apparatus for enhancing depth of focus using birefringent materi Apparatus for enhancing depth of focus using birefringent materi

1998-09-24

2000-05-02

Epps, Georgia

Optical: systems and elements

Lens

Plural focal length

430 5, 25049222, G02B 310, G03F 900, G21K 510

Patent

active

060579706

ABSTRACT:
The present invention relates to an apparatus for forming fine patterns in semiconductor devices, display devices and micro-electro-mechanical systems and more particularly to an image projecting system using an optical component, which is made of birefringent material, in the lithography techniques. The lithography apparatus according to the present invention comprises an optical lens system in which an image of a photomask is transferred to an object by a light source, wherein said optical lens system comprises a plurality of isotropic optical unit and at least one birefringent optical unit, said birefringent optical unit including at least one of said birefringent optical components.

REFERENCES:
patent: 3990798 (1976-11-01), White
patent: 4981342 (1991-01-01), Fiala
patent: 5142411 (1992-08-01), Fiala
patent: 5410375 (1995-04-01), Fiala
patent: 5671034 (1997-09-01), May et al.
patent: 5712721 (1998-01-01), Large
patent: 5905708 (1999-05-01), Richter
A.M. Goethals, "Top surface imaging and Optical Proximity Correction: A way to 0.18 .mu.m lithography at 248 nm", SPIE vol. 2726, pp. 362-374, (1996).
Hiroshi Fukuda et al., "A New Method for Enhancing Focus Latitude in Optical Lithography: FLEX", IEEE Electron Device Letters, vol. EDL-8, No. 4, Apr. 1987.
Marc D. Levenson, et al., "Improving Resolution in Photolithography with a Phase-Shifting Mask", 1982 IEEE, pp. 1828-1836.

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