Apparatus for energy-selective visualization

Details Apparatus for energy-selective visualization Apparatus for energy-selective visualization

1987-03-17

1988-12-06

Fields, Carolyn E.

Radiant energy

Electron energy analysis

250311, H01J 3700

Patent

active

047897805

ABSTRACT:
An apparatus for energy-selective visualization of a beam of charged particles emerging from an object is equipped with a double-focusing energy analyzer which is provided with a two-dimensional entrance diaphragm. For visualization of both an image and a spectrum, an optical imaging system behind the analyzer is preferably equipped with one or more quadrapole lenses. An illumination system for an object to be examined is preferably equipped with a system for a sequential partial illumination of the object.

REFERENCES:
patent: 3909610 (1975-09-01), Kokubo
patent: 4034220 (1977-07-01), le Gressus et al.
patent: 4107526 (1978-08-01), McKinney et al.
Kuyatt et al., Field Emission Deflection Energy Analysis, Review of Scientific Inst., vol. 43, #1, Jan. 72 pp. 108-111.

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