Apparatus for electrochemically depositing a material onto a...

Details Apparatus for electrochemically depositing a material onto a... Apparatus for electrochemically depositing a material onto a...

2006-04-25

2006-04-25

King, Roy (Department: 1742)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S22400M, C204S22400M

Reexamination Certificate

active

07033464

ABSTRACT:
A multi-process workpiece apparatus is disclosed. The multi-process workpiece apparatus includes an electrochemical deposition apparatus which has a wafer contacting surface having at least one electrical conductor disposed therein. The multi-process workpiece apparatus also includes a planarization apparatus and at least one workpiece handling robot configured to transport a workpiece from the electrochemical deposition apparatus to the planarization apparatus.

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