Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1993-09-24
1996-08-06
Nguyen, Vinh P.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324 96, G01R 2912
Patent
active
055437230
ABSTRACT:
A method and an apparatus for electro-optic sampling measurement of electrical signals in integrated circuits, capable of improving the reproducibility of the measurements and calibrating the voltage accurately. The changes of beam intensity of a laser beam reflected from an electro-optic probe is measured by using a low frequency signal of a known voltage level to determine a relationship between the changes of beam intensity and gaps between the electro-optic probe and the integrated circuit, then a proportionality of the change of beam intensity and an absolute voltage level for a desired gap is determined according to the determined relationship. Then, the change of beam of intensity at a desired measurement position with a desired gap is measured by using a high frequency signal and the absolute voltage level of the high frequency signal is determined according to the measured change of beam intensity and the determined proportionality. The electro-optic probe is positioned by first bringing the electro-optic probe into a contact with the integrated circuit to detect a contact position, and then moving the electro-optic probe away from the integrated circuit to provide a desired gap with respect to the detected contact position regarded as a reference point.
REFERENCES:
patent: 4851767 (1989-07-01), Halbout et al.
patent: 4864227 (1989-09-01), Sato
patent: 4866372 (1989-09-01), Aoshima et al.
patent: 4894607 (1990-01-01), Kumada
patent: 4985676 (1991-01-01), Karasawa
patent: 5065103 (1991-11-01), Slinkman et al.
Nagatsuma Tadao
Shinagawa Mitsuru
Nguyen Vinh P.
Nippon Telegraph and Telephone Corporation
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