Apparatus for drying substrates

Details Apparatus for drying substrates Apparatus for drying substrates

1987-05-07

1988-04-05

Bennet, Henry A.

Drying and gas or vapor contact with solids

Apparatus

With apparatus using centrifugal force

34 8, 34186, F26B 1724

Patent

active

047350008

ABSTRACT:
An apparatus for drying substrates by means of centrifugal force. Air is introduced into a drying chamber from the top end thereof. A rotary member is provided in the drying chamber, on which is mounted a cassette in which a plurality of substrates to be dried are stored. An auxiliary chamber is disposed at the bottom part of the drying chamber, within which fan blades are provided. An auxiliary exhausting duct is connected to the auxiliary chamber, whereby fine particles of dust produced around the bearing are completely exhausted.

REFERENCES:
patent: 4677759 (1987-07-01), Inamura

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