Fluid handling – With heating or cooling of the system
Patent
1996-01-16
2000-11-28
Chambers, A. Michael
Fluid handling
With heating or cooling of the system
137269, 137561A, 137597, F16L 5700
Patent
active
061521663
ABSTRACT:
An equalization chamber has a first plurality of gas inlet openings for a gas stream and a second plurality of gas outlet openings for partial gas streams, each outlet being connected by way of a gas line to a gas consumer, the maximum flow resistance for each partial gas stream being located in the area under the gas outlet openings, seen in the flow direction of the partial gas streams. To guarantee the highest possible degree of uniformity and reproducibility of the gas supply to the consumers, the maximum flow resistance for each partial gas stream is provided in the gas line between the gas outlet opening and the gas consumer.
REFERENCES:
patent: 3785402 (1974-01-01), Collier
patent: 4263939 (1981-04-01), Bird
patent: 5056597 (1991-10-01), Stowe, III
patent: 5116400 (1992-05-01), Abbott et al.
patent: 5311850 (1994-05-01), Martin
patent: 5334352 (1994-08-01), Johnson
Bauscher Heinz
Ruppert Klaus
Chambers A. Michael
Heraeus Quarzglas GmbH & Co KG
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