Apparatus for dispensing slurry

Details Apparatus for dispensing slurry Apparatus for dispensing slurry

1998-07-10

2000-08-08

Kashnikow, Andres

Fluid sprinkling, spraying, and diffusing

Slinger or splasher; or deflector rotated relative to effluent

Disc impeller type or bowl-like slinger or deflector

239104, 239106, 239214, 239215, 239219, 239224, B05B 302, B05B 310

Patent

active

060989017

ABSTRACT:
A slurry dispenser dispensing slurry by a pair of counter-rotating wheels is provided in a chemical mechanical polishing process used in manufacturing integrated circuits. The slurry dispenser is driven by variable speed motors at a predetermined speed empirically determined to dispense a desired amount of slurry. The shape of the rotating wheels controls the vertical distribution of the spray. Openings in the housing of the slurry dispenser and the speed of rotation of the wheels controls the horizontal distribution of the spray. The slurry dispenser can be constructed out of materials chemically inert with respect to the slurry.

REFERENCES:
patent: Re30963 (1982-06-01), Moller et al.
patent: 1488356 (1924-03-01), Linke
patent: 1535147 (1925-04-01), Colpitts
patent: 2537833 (1951-01-01), Joos
patent: 2783088 (1957-02-01), Butler
patent: 5203506 (1993-04-01), Gross et al.

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