Apparatus for dispensing slurry

Details Apparatus for dispensing slurry Apparatus for dispensing slurry

1997-11-05

1999-10-12

Kashnikow, Andres

Fluid sprinkling, spraying, and diffusing

Slinger or splasher; or deflector rotated relative to effluent

Disc impeller type or bowl-like slinger or deflector

239224, 239231, 239502, B05B 310, B05B 126

Patent

active

059644133

ABSTRACT:
A slurry dispenser dispensing slurry by a rotating wheel is provided in a chemical-mechanical polishing process used in manufacturing integrated circuits. The slurry dispenser is driven by a variable speed motor at a predetermined speed empirically determined to dispense a desired amount of slurry. A groove is provided along the circumfrence of the rotating wheel to control the width of the spray. At the same time, walls in the housing of the slurry dispenser restrict the angle of the spray. The slurry dispenser can be constructed out of material chemically inert with respect to the slurry.

REFERENCES:
patent: Re30963 (1982-06-01), Moller et al.
patent: 3711025 (1973-01-01), Miller
patent: 4553700 (1985-11-01), Snyder et al.
patent: 5203506 (1993-04-01), Gross et al.
patent: 5743788 (1998-04-01), Vanell
patent: 5804507 (1998-09-01), Perlov et al.

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