Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate
2006-01-03
2006-01-03
Pham, Hoa Q. (Department: 2877)
Optics: measuring and testing
Dimension
Thickness
C427S010000, C427S162000, C427S567000, C118S665000, C204S298010
Reexamination Certificate
active
06982797
ABSTRACT:
The invention relates to an apparatus for devices for determining properties of thin layers applied on a substrate. This apparatus comprises two changing magazines wherein one magazine is provided for crystal resonators and the other magazine for test glasses. The changing magazine for crystal resonators has the form of a disk and is encompassed by the annular magazine for test glasses. Both can be rotated independently of one another. Each position of the magazines can be reproduced with the aid of sensors and evaluation devices. Consequently, it is possible to carry out multiple coatings.
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Fulbright & Jaworski L.L.P.
Leybold Optics GmbH
Pham Hoa Q.
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