Thermal measuring and testing – Temperature measurement – In spaced noncontact relationship to specimen
Patent
1997-07-24
2000-02-22
Gutierrez, Diego
Thermal measuring and testing
Temperature measurement
In spaced noncontact relationship to specimen
374131, 374126, 219405, 392416, 25049222, G01J 508, G01N 2500, H05B 102, A21B 200
Patent
active
060272449
ABSTRACT:
The present invention is generally directed to a system and process for accurately determining the temperature of an object, such as a semi-conductive wafer, by sampling from the object radiation being emitted at a particular wavelength. In one embodiment, a single reflective device is placed adjacent to the radiating object. The reflective device includes areas of high reflectivity and areas of low reflectivity. The radiation being emitted by the object is sampled within both locations generating two different sets of radiation measurements. The measurements are then analyzed and a correction factor is computed based on the optical characteristics of the reflective device and the optical characteristics of the wafer. The correction factor is then used to more accurately determine the temperature of the wafer. In an alternative embodiment, if the radiating body is semi-transparent, a reflective device is placed on each side of the object, which compensates for the transparency of the object.
REFERENCES:
patent: 4919542 (1990-04-01), Nulman et al.
patent: 5114242 (1992-05-01), Gat et al.
patent: 5154512 (1992-10-01), Schietinger et al.
patent: 5165796 (1992-11-01), Gat et al.
patent: 5188458 (1993-02-01), Thompson et al.
patent: 5226732 (1993-07-01), Nakos et al.
patent: 5249142 (1993-09-01), Shirakawa et al.
patent: 5255286 (1993-10-01), Moslehi et al.
patent: 5271084 (1993-12-01), Vandenabeele et al.
patent: 5305416 (1994-04-01), Fiory
patent: 5308161 (1994-05-01), Stein
patent: 5442727 (1995-08-01), Fiory
patent: 5443315 (1995-08-01), Lee et al.
patent: 5444815 (1995-08-01), Lee et al.
patent: 5467220 (1995-11-01), Xu
patent: 5624590 (1997-04-01), Fiory
patent: 5628564 (1997-05-01), Nenyei et al.
patent: 5660472 (1997-08-01), Peuse et al.
patent: 5738440 (1998-04-01), O'Neill et al.
patent: 5874711 (1999-02-01), Champetier et al.
James F. Schooley, "Temperature, Its Measurement and Control in Science and Industry", vol. 6, pp. 923-927, American Institute of Physics, New York, 1992, pp. 933-938, 877-882, 787-789, 843-847.
Champetier Robert J.
Egozi David
Gutierrez Diego
Pruchnic Jr. Stanley J.
Steag RTP Systems, Inc.
LandOfFree
Apparatus for determining the temperature of a semi-transparent does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Apparatus for determining the temperature of a semi-transparent , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for determining the temperature of a semi-transparent will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-515372