Apparatus for determining the surface topography of an article

Details Apparatus for determining the surface topography of an article Apparatus for determining the surface topography of an article

1991-10-17

1994-03-29

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356448, 356239, 250571, 250572, G01B 1130, G01N 2100

Patent

active

052989747

ABSTRACT:
An apparatus for determining the surface characteristics of a flat transparent article which includes a light beam source, a scanner to deflect the light beam to produce a line scan, a lens to collimate the light beam of the line scan, a locator for the flat transparent article to enable the article to be exposed to the collimated light, a grating through which the portion of collimated light reflected by the surface of the located article passes, another lens to focus the collimated light passing through the grating onto a sample detector which generates an intensity indicative signal, and a base reference signal generator. The signals are processed by a microprocessor to indicate the surface characteristics.

REFERENCES:
patent: 3748048 (1973-07-01), Upatnieks et al.
patent: 3857637 (1974-12-01), Obenreder
patent: 4158507 (1979-06-01), Himmel
patent: 4929846 (1990-05-01), Mansour
patent: 4937764 (1990-06-01), Komatsu
patent: 5122672 (1992-06-01), Mansour
Research Disclosure, "Device for Evaluating Film Flatness"; Ghassan N. Kahwati; Oct. 1980 p. 409.
Chap. 11-3, pp. 422-423, Laser Processing Theory, Central Book Publishing Co. (Taiwan).
Pp. 136-137, Optical Shop Testing, ed. Daniel Malacara (New York).
English Abstract of Japanese Reference 57-35704; Feb. 1982.

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