Apparatus for determining the concentration of a gas in a vacuum

Details Apparatus for determining the concentration of a gas in a vacuum Apparatus for determining the concentration of a gas in a vacuum

1992-05-12

1994-02-01

Berman, Jack I.

Radiant energy

Ionic separation or analysis

With evacuation or sealing means

250288, 20419213, H01L 21203

Patent

active

052834352

ABSTRACT:
An apparatus for determining the concentration of a gas in a vacuum chamber is described. Internal to the vacuum chamber are one or more cathodes. The chamber is fed via a gas inlet and is connected to a separate measurement chamber for accommodating a measuring device via a connecting line between the two chambers. The connecting line in conjunction with a pumping means produces a pressure gradient between the interior of the vacuum chamber and the interior of the measurement chamber. One end of the connecting line, located within the vacuum chamber terminates directly in the central region of a cathode surfaces facing the interior of the chamber, and the length, as well as the cross section of the connecting line being dimensioned so that the pressure gradient between the interior of the vacuum chamber and the interior of the measurement chamber, is precisely that required for measurement.

REFERENCES:
patent: 4172020 (1979-10-01), Tisone et al.
patent: 4362936 (1982-12-01), Hofmann et al.
patent: 4975168 (1990-12-01), Ohno et al.
JP Patent Abstracts of Japan: 2-47255 A., C-715, May 2, 1990, vol. 14, No. 211.
1-287264 A., C-685, Feb. 6, 1990, vol. 14, No. 63.
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62-211377 A., C-480, Mar. 9, 1988, vol. 12, No. 75.
62-151562 A., C-464, Dec. 12, 1987, vol. 11, No. 381.

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