Apparatus for determining reflectivity of an object such as a mi

Details Apparatus for determining reflectivity of an object such as a mi Apparatus for determining reflectivity of an object such as a mi

1985-09-13

1987-09-01

Howell, Janice A.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

250338, 250341, 2503601, 356447, 356448, G01N 2155

Patent

active

046911065

ABSTRACT:
An apparatus for detecting defects in a laser mirror by using a laser beam in order to detect any possible changes in reflectivity over the surface of the mirror. A laser beam is split by a beam splitter into one portion for scanning the mirror to be inspected and which is reflected therefrom to produce a reflection signal, the remaining portion of the beam providing a reference signal. A computer receives both signals and on the basis of comparison thereof determines the condition of the mirror because there will be incorrect reflection of the laser beam from any region of the mirror which is defective.

REFERENCES:
patent: 3991302 (1976-11-01), Danner
patent: 4203064 (1980-05-01), Suzuzi et al.
patent: 4511800 (1985-04-01), Harbeke et al.
S. F. Johnston and B. P. Clayman, "Reflectivity Measurements on Hot Reactive Liquids Using a FIR Laser", Applied Optics, vol. 19, No. 18 (Sep. 1980), pp. 3118-3120.
V. T. Prokopenko and A. D. Yaskov, "An Infrared Introscope with a CO.sub.2 Laser for the Investigation of Microinhomogeneities of the Structure of Semiconductors", Translation of Pribory i Tekhnika Eksperimenta, No. 3 (May-Jun. 1974), pp. 215-216.

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