Apparatus for determining mutual positional relationship of plur

Details Apparatus for determining mutual positional relationship of plur Apparatus for determining mutual positional relationship of plur

1976-07-13

1977-10-18

Corbin, John K.

Optics: measuring and testing

Angle measuring or angular axial alignment

Alignment of axes nominally coaxial

356171, 356172, G01B 1126

Patent

active

040543862

ABSTRACT:
The mutual positional relationship of a first pattern and a second pattern in a single viewing field will be determined. A light beam passing through an objective lens is divided by means of a beam splitter into a first light beam advancing along a first optical path and a second light beam advancing along a second optical path. Said first and second light beams are again united by a beam combiner to form, on an image plane, a first image of said first and second patterns formed by said first light beam passing through said first optical path and a second image of said first and second patterns formed by said second light beam passing through said second optical path. In said first optical path there is provided an adjuster for displacing, in said image plane, the first image of said first and second patterns formed by said first light beam. An adjustment is made with said adjuster so as to bring said first image of patterns formed by said first light beam to a predetermined position with respect to the second image of patterns formed by said second light beam, and the amount of such adjustment is determined by an adjustment detector. Thus the positional mutual relationship of said first and second patterns is determined from the thus detected amount of adjustment.

REFERENCES:
patent: 3667848 (1972-06-01), Percival
patent: 3752589 (1973-08-01), Kobayashi

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