Apparatus for detecting the position of incidence of particle be

Details Apparatus for detecting the position of incidence of particle be Apparatus for detecting the position of incidence of particle be

1987-09-11

1989-11-21

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

313103CM, H01J 3150, H01J 4014

Patent

active

048824801

ABSTRACT:
An apparatus is provided for detecting the one-dimensional position of incidence of particle beams. The apparatus comprises

REFERENCES:
patent: 4024390 (1977-05-01), Bosserman et al.
patent: 4051468 (1977-09-01), Rajchman
patent: 4086486 (1978-04-01), Bybee et al.
patent: 4109178 (1978-08-01), Catanese et al.
patent: 4184069 (1980-01-01), Bosserman
patent: 4555731 (1985-11-01), Zinchuk
patent: 4560898 (1985-12-01), Knapp et al.
patent: 4764139 (1988-08-01), Murata et al.

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