Apparatus for detecting the position of incidence of a beam of c

Details Apparatus for detecting the position of incidence of a beam of c Apparatus for detecting the position of incidence of a beam of c

1987-12-03

1989-06-27

Anderson, Bruce C.

Radiant energy

Means to align or position an object relative to a source or...

250397, 250399, G01J 100

Patent

active

048432466

ABSTRACT:
The invention concerns apparatus for detecting the position of incidence (2) of a beam (1) of charge carriers on a target (3) wherein X-rays (4) starting from the position of incidence (2) are detected by detector (7) connected to an analyzing circuit (9) An imaging system (5, 50; 10, 11, 12) is provided which can cover all the positions (P.sub.1 . . . P.sub.8) that the positions of incidence (2) can take up and projects them on the sensing surface of a position-sensitive detector (7), wherein the projected coordinates (x', y') are directly proportional to the coordinates (x, y) of the position of incidence (2). In addition, a filter (6) highly transparent to the X-ray radiation range emitted from the position of incidence (2) is arranged between the target surface (3) and the position-sensitive sensor (7). The position-sensitive detector (7) emits electric signals which depend from the coordinates (x, y) of the position of incidence (FIG. 1).

REFERENCES:
patent: 3207902 (1965-09-01), Sandborg
patent: 3597577 (1971-08-01), Guittet et al.
patent: 3829684 (1974-08-01), Assouline et al.
patent: 3947381 (1976-08-01), Rohrle et al.
patent: 4593199 (1986-06-01), Yaniv et al.
Siebert, "Optoelektronische Positiondetectoren PSD: Volig aufglost," Elektronik, vol. 13, Jun. 29, 1984, pp. 84-88.
Verlag, "Positionserfassung: Detektor ausSilizium," Sounderdruck aus >>industrie-elektrik+elektronik<<, Jan. 28, 1983, No. 8.

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