Apparatus for detecting the level of an object surface

Details Apparatus for detecting the level of an object surface Apparatus for detecting the level of an object surface

1988-05-03

1989-09-05

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250561, 356 1, 356 4, 356369, G01C 300, G02F 101

Patent

active

048641235

ABSTRACT:
An apparatus for detecting the level of an object surface comprises a light source for supplying a light beam obliquely incident on the object surface, an imaging optical system provided to image the light beam reflected by the object surface, a light-receiving element having a detecting surface coincident with the imaging plane of the imaging optical system and determining the level of the object surface on the basis of the position of the image of the light beam on the detecting surface, and polarization correcting optics provided on an optical path leading from the light source via the object surface to the detecting surface for adjusting the intensity ration between the two mutally orthogonal polarized light components of the light beam.

REFERENCES:
patent: 3601613 (1971-08-01), Hock
patent: 3985447 (1976-10-01), Aspnes
patent: 4650983 (1987-03-01), Suwa

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