Apparatus for detecting the focus adjusted state of an objective

Details Apparatus for detecting the focus adjusted state of an objective Apparatus for detecting the focus adjusted state of an objective

1988-03-01

1989-08-08

Adams, Russell E.

354404, G03B 300

Patent

active

048557773

ABSTRACT:
An focus detecting apparatus has a scanning plate disposed on or near the predetermined imaging plane of an objective lens and reciprocally movable to grating-scan the image of an object, a mask having an aperture adjacent to the scanning plate and movable to a desired position in a plane perpendicular to the optic axis of the objective lens to determine a range for detection, a plurality of light-receiving devices for receiving light fluxes passed through the scanning plate and the mask and outputting a signal regarding the focus adjusted state of the objective lens, and a field lens for relating the light fluxes entering the light-receiving devices to each other so as to pass through different areas of the exit pupil of the objective lens.

REFERENCES:
patent: 3398665 (1968-08-01), John, Jr. et al.
patent: 3450018 (1969-06-01), John, Jr.
patent: 3856407 (1974-12-01), Takeda et al.
patent: 3896457 (1975-07-01), Yamanishi et al.
patent: 4047022 (1977-09-01), Holle
patent: 4209241 (1980-06-01), Nanba et al.
patent: 4543476 (1985-09-01), Horikawa

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