Apparatus for detecting the defects of a pattern with directiona

Details Apparatus for detecting the defects of a pattern with directiona Apparatus for detecting the defects of a pattern with directiona

1979-03-22

1981-11-10

Corbin, John K.

Optics: measuring and testing

Range or remote distance finding

With photodetection

356 71, 356239, G02B 2738, G01N 2100

Patent

active

042994438

ABSTRACT:
An apparatus for detecting the defects composed of non-linear components of a subject pattern, includes a laser source for illuminating the subject pattern by a laser beam, a Fourier-transform lens for projecting an information light from the pattern through a spatial filter onto a screen. The filter is placed on the Fourier-transform plane of the Fourier-transformed information light for intercepting the coherent light having information on linear components, the filter having arm sections extending correspondingly to the linear components of said normal pattern, the outer periphery of said arm sections including curved sections of a circular or elliptical shape protruding toward the intersecting point of the arms.

REFERENCES:
patent: 3560093 (1971-02-01), Montone
patent: 3614232 (1971-10-01), Mathisen
patent: 3658420 (1972-04-01), Axelrod
patent: 3743423 (1973-07-01), Heinz et al.
patent: 3813173 (1974-05-01), Teter
patent: 3972616 (1976-08-01), Minami et al.

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