Apparatus for detecting radiation and method for manufacturing s

Details Apparatus for detecting radiation and method for manufacturing s Apparatus for detecting radiation and method for manufacturing s

1996-08-27

2000-10-17

Ngo, Ngan V.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Electromagnetic or particle radiation

257429, 257436, 257444, 2504844, 250581, H01L 3100, H01L 31115, H01L 310232

Patent

active

061336149

ABSTRACT:
A method for manufacturing a semiconductor apparatus for detecting radiation provided with phosphor comprises the steps of forming a phosphor layer integrally with a meshed partition plate having partitions per pixel of the semiconductor apparatus for detecting radiation, and of separating the phosphor per pixel by removing the phosphor on the partitioning portion of the partition plate by the irradiation of laser beam in the form of grooves together with the surface layer of the partitioning portions in order to make the phosphor thick to obtain a higher sensitivity, and also to make pixel pitches finer to enhance resolution, thus obtaining exact images without creating any cross talks between pixels.

REFERENCES:
patent: 4914301 (1990-04-01), Akai
patent: 5041729 (1991-08-01), Takahashi et al.
patent: 5187369 (1993-02-01), Kingsley et al.
patent: 5430298 (1995-07-01), Possin et al.
European Search Report dated Sep. 22, 1998.

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