Image analysis – Histogram processing – For setting a threshold
Patent
1988-07-06
1989-08-22
Boudreau, Leo H.
Image analysis
Histogram processing
For setting a threshold
382 8, 356375, G06K 920
Patent
active
048603740
ABSTRACT:
An apparatus for detecting a position of a reference pattern or mark formed in a substrate to be aligned with a photomask pattern performs the following functions: scanning a reference pattern having at least two edges and generating a time-serial pattern signal corresponding to the scanned pattern; extracting all scanning positions at which a waveform of the pattern signal has a shape corresponding to an edge of the pattern within a predetermined scanning range including the pattern; selecting one pair from all possible pairs of a plurality of extracted scanning positions in accordance with a degree to which a pattern signal between the two scanning positions defined by each pair satisfies predetermined waveform conditions; and determining as a pattern position a predetermined position at which the interval between the two scanning positions of the selected pair is divided into two intervals by a predetermined ratio.
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Kawai Hidemi
Makinouchi Susumu
Murakami Masaichi
Murakami Seiro
Tanimoto Akikazu
Boudreau Leo H.
Couso Jose L.
Nikon Corporation
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