Apparatus for detecting position of light beam on object surface

Details Apparatus for detecting position of light beam on object surface Apparatus for detecting position of light beam on object surface

1988-10-26

1991-07-02

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

369 4424, G01J 120

Patent

active

050292617

ABSTRACT:
A light beam position detecting apparatus includes a light source and a first optical system for focusing a light beam emitted from the light source onto an object surface. The object surface has an optically unidirectional structure on the order of a size of a light spot formed by the light beam, and a second optical system focuses a detection beam transmitted through or reflected by the object surface. In addition, an optical element, disposed near a focal point of the detection beam, splits the detection beam, photosensors receive the beams split by the optical element, and a processor calculates a difference between outputs from the photosensors and detects a position of the light beam incident on the unidirectional structure.

REFERENCES:
patent: 4504938 (1985-03-01), Tajima
patent: 4682315 (1987-07-01), Uejima
patent: 4682316 (1987-07-01), Tateoka et al.
patent: 4841509 (1989-06-01), Kamisada et al.

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