Apparatus for detecting position of a notch in a semiconductor w

Details Apparatus for detecting position of a notch in a semiconductor w Apparatus for detecting position of a notch in a semiconductor w

1993-02-02

1995-08-01

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

250548, 356375, G01N 2186

Patent

active

054382092

ABSTRACT:
A semiconductor wafer placed on a table is rotated by a stepper motor stepwise by a broad pitch. At this time, a CCD line sensor transmits output signals to comparators. A CPU monitors output signals of the comparators and detects a notch formed in the wafer. After the notch is detected, the wafer is rotated stepwise by a fine pitch, and outer peripheral positional data of a notched region (outputs of an analog-to-digital converter) are sampled and stored in a RAM. The CPU computes a notch position from the outer peripheral positional data stored in the RAM. In this way, a V-shaped notch formed in a semiconductor wafer is detected speedily and with high precision.

REFERENCES:
patent: 4466073 (1984-08-01), Boyan et al.
patent: 4887904 (1989-12-01), Nakazato et al.

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