Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2005-04-26
2005-04-26
Smith, Zandra V. (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
C356S400000
Reexamination Certificate
active
06885450
ABSTRACT:
An optical positional deviation detecting apparatus comprises an irradiation optical system for irradiating a measurement mark configured by forming a second mark (e.g., a resist mark) on a first mark (e.g., a base mark) with a beam of irradiation, an image forming optical system for forming an image of the measurement mark by converging reflected beam from the measurement mark, an imaging device for photographing the image of the measurement mark, which has been formed by the image forming optical system, an image processing device for measuring the positional deviation in alignment of the second mark with respect to the first mark by processing an image signal obtained by the imaging device, and an image field area adjustment mechanism for adjusting an image field area for the imaging device to photograph the image of the measurement mark.
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Nikon Corporation
Smith Zandra V.
Stock, Jr. Gordon J.
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