Apparatus for detecting marks formed on a sample surface

Details Apparatus for detecting marks formed on a sample surface Apparatus for detecting marks formed on a sample surface

1994-11-21

1996-06-04

McGraw, Vincent P.

Optics: measuring and testing

Of light reflection

356371, 359606, G01B 1130, G01N 2155

Patent

active

055238467

ABSTRACT:
An apparatus for inspecting the surface condition of an object comprises a light source, an optical element for directing irradiating light from the light source to an object and for converging the light reflected by the surface of the object at its back focal plane to form an image behind the back focal plane, and an observing apparatus for observing the image. An aperture stop is arranged at or near the back focal plane to cut off a scattered component of the reflected light. A half mirror having two planes forming a predetermined micro angle each other deflects the reflected light from the optical path of the irradiating light.

REFERENCES:
patent: 3815998 (1974-06-01), Tietze
patent: 4346996 (1982-08-01), Miller
patent: 4428670 (1984-01-01), Ruell et al.
patent: 4907858 (1990-03-01), Hara et al.

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