Apparatus for detecting light focus position

Details Apparatus for detecting light focus position Apparatus for detecting light focus position

1994-03-08

1995-05-23

Ben, Loha

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

359196, 359217, 359218, G02B 2608

Patent

active

054186382

ABSTRACT:
An apparatus is provided for detecting a light focus position of a scanning laser beam on a surface to be scanned. A laser beam splitting member splits part of the scanning laser beam, when the beam is scanning an unnecessary scanning area. A plurality of beamlets thus irradiate on a non-scanning direction line. A determination is made of an optical path differences between the split laser beamlets. Further, the spot size of each of the split beamlets is measured, thereby determining a split beamlet irradiating the surface to be scanned based on the spot size of each of the split beamlets.

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patent: 5233188 (1993-08-01), Arimoto et al.

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