Measuring and testing – With fluid pressure – Leakage
Patent
1997-10-27
1999-07-27
Brock, Michael
Measuring and testing
With fluid pressure
Leakage
204176, 42218607, 210760, G01M 326, C01B 1310, B01D 2400, B01J 1408
Patent
active
059293241
ABSTRACT:
The present invention discloses a gas generating device that is equipped with a gas leakage detection and control system which includes a multiple number of gas generating units each equipped with flow sensors for detecting flow rates in and out of the unit and a unit controller. The gas generating device is controlled by a main controller so that when leakage in a generating unit is detected, the unit is shut off and bypassed while the outputs of the other generating units can be increased to make up the shortage such that such that the total output from the gas generating device is not affected. The present invention novel apparatus further provides the capability that any leakage in the piping system which connects the multiple number of generating units can be detected by using flow sensors installed in a main gas inlet and a main gas outlet such that the total gas flow rates coming in and going out can be continuously monitored.
REFERENCES:
patent: 3695094 (1972-10-01), Hulme
patent: 4106099 (1978-08-01), Elliott et al.
patent: 5106589 (1992-04-01), Conrad
patent: 5439026 (1995-08-01), Moriya et al.
Hu Tien Chen
Lin Philip Jan
Brock Michael
Politzer Jay L.
Taiwan Semiconductor Manufacturing Co. Ltd.
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