Apparatus for detecting foreign matters on a planar substrate

Details Apparatus for detecting foreign matters on a planar substrate Apparatus for detecting foreign matters on a planar substrate

1982-11-02

1986-02-04

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356446, G01N 2188

Patent

active

045688354

ABSTRACT:
An apparatus for detecting foreign matter present on a planar substrate comprises apparatus for scanning the surface of the substrate with an oblique incident light beam, apparatus for photo-electrically detecting the scattered light generator in the trajectory of the light beam scanning on the substrate, and apparatus for eliminating stray light unnecessary for the foreign matter detection.

REFERENCES:
patent: 2604809 (1952-07-01), Mitchell
patent: 4423331 (1983-12-01), Koizumi et al.
Klochko et al., "Photometric Method of Estimating the Particle Size _of Carbon Black", Industrial Laboratory, vol. 39, No. 5, pp. 753-_755, May '73.

Affiliated with

Also associated with

Rating

Apparatus for detecting foreign matters on a planar substrate does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus for detecting foreign matters on a planar substrate, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus for detecting foreign matters on a planar substrate will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2342709