Apparatus for detecting foreign matter on a substrate, and an ex

Details Apparatus for detecting foreign matter on a substrate, and an ex Apparatus for detecting foreign matter on a substrate, and an ex

1997-02-13

1998-04-21

Font, Frank G.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356239, G01N 2100

Patent

active

057423865

ABSTRACT:
An apparatus for detecting foreign matter on a substrate includes an optical system for projecting a light beam onto a pellicle and a pattern surface, a first detector for detecting scattered light from foreign matter on the pattern surface, a second detector for detecting information relating to the reflectivity or the transmittance of the pellicle by detecting a light beam reflected by the pellicle, and a correction unit for correcting an output signal from the first detector using an output signal from the second detector.

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